MEASURING APPARATUS FOR PARTICLE,申请号JP19880280595-传众专利搜索

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发明名称	MEASURING APPARATUS FOR PARTICLE
摘要
申请公布号	JPH02128143(A)	申请公布日期	1990.05.16
申请号	JP19880280595	申请日期	1988.11.07
申请人	MITSUBISHI ELECTRIC CORP	发明人	NAGAMINE TAKAKO
分类号	G01N15/14;H01L21/66	主分类号	G01N15/14
代理机构		代理人
主权项
地址

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