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发明名称
VERY-LOW TEMPERATURE APPARATUS
摘要
申请公布号
JPH02126688(A)
申请公布日期
1990.05.15
申请号
JP19880279311
申请日期
1988.11.07
申请人
TOSHIBA CORP
发明人
MIURA AKIHIKO
分类号
H01L39/04
主分类号
H01L39/04
代理机构
代理人
主权项
地址
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