发明名称 SURFACE ANALYSIS DEVICE
摘要 PURPOSE:To make it possible to analyze even light atoms which are low in mass number by tilting a specimen to proton beams in case of the light atoms in order to measure the speeds of recoil atoms, holding the specimen close to the direction normal to the proton beams in case of heavy atoms, and thereby determine the loss in energy of scattered protons by a position detector so as to obtain the spectrum of each atom. CONSTITUTION:In case of light atoms, a specimen is held obliquely to the axial line of protons so that recoil atoms go into a TOF device which is arranged obliquely. Then, when the speed is obtained by a step of measuring the time from the departure of each atom out of the specimen 4 to its arrival to a micro- channel plate 8, the kind of the atom is determined. In case of heavy atoms, the specimen 4 is held to the direction normal to the incident beam of the protons. In this case, the protons are scattered in all directions by the heavy atoms, but only the proton with H=180 deg. out of them goes into a position detector 5, the abundance of the heavy protons is thereby determined by a step of counting the protons going into the respective positions of the position detector 5. By this constitution, it is possible to make the measurement of the atoms in a wide range complementarily by a single device.
申请公布号 JPH02126550(A) 申请公布日期 1990.05.15
申请号 JP19880279154 申请日期 1988.11.04
申请人 NISSIN ELECTRIC CO LTD 发明人 AOKI MASAHIKO
分类号 G01N23/225;H01J37/244;H01J37/252;H01J49/44 主分类号 G01N23/225
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