发明名称 Method and apparatus for sensing the figure of optical elements
摘要 A laser source 28 and curvature matching optics 30 cooperate to generate a probe beam 32 having a generally Gaussian phase front with a given radius of curvature. The probe beam is reflected off of the surface of a primary mirror 12 and the differences, if any, between the radii of curvature of the probe beam 32 and mirror surface is detected by detector array 38. Suitable feedback circuitry can be employed to drive the actuators of segments 16-22 to provide the mirror 12 with the desired figure.
申请公布号 US4925301(A) 申请公布日期 1990.05.15
申请号 US19880272375 申请日期 1988.11.17
申请人 HUGHES AIRCRAFT COMPANY 发明人 RAFANELLI, GERARD L.
分类号 G01B11/255 主分类号 G01B11/255
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