| 摘要 |
PURPOSE:To increase the quantity of light projected to a mark and perform writing in a recording medium having high light exposure as well as rapid writing by making use of auxiliary lighting system at the time of writing to the photoelectric magnetic recording medium of a mark for detecting positions. CONSTITUTION:A photoelectric magnetic recording medium 6 is positioned in the vicinity of an optical axis of a projection optical system 3 by moving a movable state 5. A mark 18 for detecting positions on the face of a reticle 2 is transferred on the photoelectric magnetic recording medium 6 and writing is performed. In such a case, an auxiliary lighting system 110 is moved to a place in the vicinity of the optical axis of the projection optical system 3 and its system allows exposure light from a lighting optical system 1 to be condensed and then a great deal of light is irradiated to the mark 18 by increasing flux density. The light irradiated to the mark 18 is established so that the mark 18 for detecting positions becomes strong enough to be recorded magnetically on the photoelectric magnetic recording medium 6. |
