发明名称 Sensor devices with internal packaged coolers
摘要 Heat sensitive sensors, such as charge coupled devices which must be cooled to reduce dark current leakage, are packaged in a chip carrier and in contact with the cold surface of an electrothermal cooler the warm opposite surface of which contacts the floor of the carrier to heat the carrier body and the window of the chip carrier to prevent fogging of the cover glass while the sensor remains cold.
申请公布号 US4926227(A) 申请公布日期 1990.05.15
申请号 US19860891627 申请日期 1986.08.01
申请人 NANOMETRICS INC. 发明人 JENSEN, EARL M.
分类号 H01L23/38 主分类号 H01L23/38
代理机构 代理人
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