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发明名称
VERFAHREN ZUR HERSTELLUNG INTEGRIERTER SCHALTUNGEN UNTER EINBEZIEHUNG VON SCHRITTEN ZUM NACHWEIS VON GETTERSTELLEN.
摘要
申请公布号
AT52636(T)
申请公布日期
1990.05.15
申请号
AT19850307851T
申请日期
1985.10.30
申请人
UNISYS CORPORATION
发明人
NEMIROFF, MICHAEL HENRY
分类号
G01N23/207;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01N23/207
代理机构
代理人
主权项
地址
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