发明名称 MASK CONTROL SYSTEM
摘要 PURPOSE:To unnecessitate a mask discrimination medium different from a mask, and eliminate disorder by which the discrimination of mask location is made impossible by recording a mask name, a lot number, a first bar code corresponding with the name, and a second bar code corresponding with the lot number, on the outer periphery of element forming region of the mask. CONSTITUTION:An element forming region 8 is arranged in the central part of a mask 5; a coded name 9 and a coded lot number 10 are recorded on the outer periphery of the element forming region 8; further a bar code 6 corresponding with the name 9, and a bar code 7 corresponding with the lot number 10 are recorded. The mask 5 can be discriminated by reading the bar codes 6, 7 on the mask 5 by using a bar code reader 1. A mask location discrimination apparatus 4 deciphers the mask information, and stores the location of the mask 5 of each terminal unit 2, thereby controlling the location of each mask 5. As a result, providing a mask discrimination medium different from the mask is unnecessitated, and accurate control of mask location is enabled.
申请公布号 JPH02125605(A) 申请公布日期 1990.05.14
申请号 JP19880279732 申请日期 1988.11.04
申请人 NEC CORP 发明人 KABATA KAZUO
分类号 G03F1/38;G06K7/00;H01L21/027;H01L21/30 主分类号 G03F1/38
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