| 摘要 |
PURPOSE:To obtain a gas laser device having high quality of laser beam by forming a space having different lateral and longitudinal sizes of a section perpendicular to a laser light axis direction between dielectric provided oppositely to a dielectric wall, and forming a microwave mode having an electric field perpendicular to a boundary between the dielectric and a plasma to generate a plasma. CONSTITUTION:In order to conduct a microwave discharge in a discharge space 67 formed between a conductor wall 65 for forming part of a microwave circuit and a dielectric 66 to become a microwave incident window, the microwave is incident only form one face of a plasma, a phenomenon in which the microwave mode of coaxial mode with the plasma in the conductor is managed does not occur, and discharge by a desired microwave mode can be conducted. A vertical electric field is provided also in the wall 65, and an electric field passing the plasma is generated. In this case, the terminating current of the incident microwave flows to the wall 65, the electric field is forcibly formed perpendicularly to the surface of the wall 65, and the field passing the plasma is maintained. |
