发明名称 ION PRODUCING APPARATUS
摘要 An ion-producing apparatus conprises an electron-producing vessel having an electron-producing chamber; an ion-producing vessel having an ion-producing chamber communicating with the electron-producing chamber, and an opening through which ions are emitted from the ion- producing vessel; a cathode provided at one end of said electron- producing vessel; an accelerating electrode provided within the ion- procucing chamber, for allowing passage of electrons; an anode provided between the cathode and accelerating electrode, and opposing the accelerating electrode, for allowing passage of electrons; means for supplying material to be ionizd, to the ion-producing chamber; a power supply circuit for providing a difference in potential between the cathode and anode evacuation means for evacuating gas from the electron-producing chamber and the ion-producing chamber.
申请公布号 KR900003310(B1) 申请公布日期 1990.05.14
申请号 KR19870004962 申请日期 1987.05.19
申请人 RIKAGAKU KENKYUSHO;TOKYO ELECTRON LTD 发明人 HARA TAMIO;HAMAGAKI MANABU;AOYAGI YOSHINOBU;NAMBA SUSUMU;ISHII NOBUO;TAKAYAMA MAOKI
分类号 H05H1/24;(IPC1-7):H05H1/24 主分类号 H05H1/24
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