摘要 |
An ion-producing apparatus conprises an electron-producing vessel having an electron-producing chamber; an ion-producing vessel having an ion-producing chamber communicating with the electron-producing chamber, and an opening through which ions are emitted from the ion- producing vessel; a cathode provided at one end of said electron- producing vessel; an accelerating electrode provided within the ion- procucing chamber, for allowing passage of electrons; an anode provided between the cathode and accelerating electrode, and opposing the accelerating electrode, for allowing passage of electrons; means for supplying material to be ionizd, to the ion-producing chamber; a power supply circuit for providing a difference in potential between the cathode and anode evacuation means for evacuating gas from the electron-producing chamber and the ion-producing chamber.
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