WAFER BOAT FOR LONGITUDINAL HEAT TREATMENT FURNACE,申请号JP19880278047-传众专利搜索

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发明名称	WAFER BOAT FOR LONGITUDINAL HEAT TREATMENT FURNACE
摘要
申请公布号	JPH02123736(A)	申请公布日期	1990.05.11
申请号	JP19880278047	申请日期	1988.11.02
申请人	TEL SAGAMI LTD	发明人	ISHII KATSUMI
分类号	H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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