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发明名称
MANUFACTURE OF DIAPHRAGM FOR SEMICONDUCTOR PRESSURE SENSOR
摘要
申请公布号
JPH02123769(A)
申请公布日期
1990.05.11
申请号
JP19880278380
申请日期
1988.11.02
申请人
SHINDENGEN ELECTRIC MFG CO LTD
发明人
YANAGISAWA TSUTOMU;SHIMIZU MASAAKI
分类号
H01L21/306;H01L29/84
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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