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发明名称
ION BEAM IRRADIATION DEVICE
摘要
申请公布号
JPH02123653(A)
申请公布日期
1990.05.11
申请号
JP19880276757
申请日期
1988.11.01
申请人
FUJITSU LTD
发明人
MORI HARUHISA
分类号
H01J37/18;H01J37/317;H01L21/265
主分类号
H01J37/18
代理机构
代理人
主权项
地址
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