Finely controlling point of scanning tunnelling microscope - exerting electrostatic forces on metallised oxide diaphragm deflected vertically by tensions in two directions

摘要

A measuring head is constituted by a rigid upper capacitor element and a lower element consisting partly of an elastic diaphragm which carries the tunnelling point (6). the rigid element is mfd. from a 300-micron Si substrate (1) having one face covered with about 300 nm of oxide (2). The lower element has a Si substrate thinned to 30 microns and oxidised (4) to 300 nm for etching of a circular space (8) within a ring (3). The oxide diaphragm (4) is metallised (5) with 100 nm of film on which the point (6) is positioned centrally. USE/ADVANTAGE - Esp. in solid-state physical and chemical research, material sscience, microbiology, microelectronics, mechanical and electrical testing and genetic engineering. Small and readily replaceable head can be mass-produced by microelectronic and micromechanical techniques.