| 摘要 |
PURPOSE:To always accurately detect a position where a capillary is in contact with a bonding face without erroneous detection due to noise by making constitution wherein by comparing the value stored in a memory device with an output value of a position sensor, a detection signal is generated when an absolute value of the difference between said values reaches a constant value or higher. CONSTITUTION:When a capillary 2 drops, a solenoid 21 is supplied with power, a bonding arm 4 and a swingable arm 16 integrally rotate counterclockwise, and the output voltage V0 of a photoelectric sensor 20 is temporarily stored through a sample and hold circuit 24. When a suction force of the solenoid 21 is lowered and the capillary 2 comes into contact with a bonding face, the capillary 2 stops at the position but the swingable arm 16 further lowers and stops after it has moved by a constant distance. According to displacement of the swingable arm 16, the photoelectric sensor 20 rotates counterclockwise to have its relative position with respect to a light shielding plate 17, and output voltage V of the photoelectric sensor 20 is varied. With voltage V0 compared with the output voltage V of the photoelectric sensor 20 in a comparator circuit 26, a detection signal is output when the absolute value of their difference is a predetermined value DELTAV or lower. |
