DEVICE FOR FORMING DEPOSITED FILM,申请号JP19880273083-传众专利搜索

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发明名称	DEVICE FOR FORMING DEPOSITED FILM
摘要
申请公布号	JPH02122077(A)	申请公布日期	1990.05.09
申请号	JP19880273083	申请日期	1988.10.31
申请人	CANON INC	发明人	SUZUKI NOBUMASA
分类号	C23C16/48;C23C16/50;H01L21/205;H01L21/31	主分类号	C23C16/48
代理机构		代理人
主权项
地址

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