| 摘要 |
<p>PURPOSE:To enhance adherence without using metal other than precious metals by a method wherein a first precious metal thin film layer, consisting of a precious metal for resistance element having internally mingled oxygen and formed on a glass substrate, and a second precious metal thin film layer, consisting of a precious metal for resistance element and formed on the first precious metal thin film layer, are provided on the title resistor. CONSTITUTION:A platinum thin film resistor has a glass substrate 1 mainly composed of SiO2, a first platinum thin film layer 2 formed on the glass substrate 1 in the mixed atmosphere of inert gas and oxygen, and a second platinum thin film layer 3 having the desired resistance pattern shape and formed on the first platinum thin film layer 2 in the atmosphere containing inert gas only. A lead wire 4 is bonded at both ends of the second platinum thin film layer 3. The switching from the formation process of the first platinum thin film layer 2 to the formation process of the second platinum thin film layer 3 can be conducted be merely changing the atmosphere.</p> |
