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发明名称
APPARATUS FOR COATING SUBSTRATES
摘要
申请公布号
EP0307539(A3)
申请公布日期
1990.05.09
申请号
EP19880106469
申请日期
1988.04.22
申请人
LEYBOLD AKTIENGESELLSCHAFT
发明人
ARNOLD, MANFRED, DR.;WIRZ, PETER, DR.
分类号
C23C14/34;C23C14/56;(IPC1-7):C23C14/56
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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