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经营范围
发明名称
FILM CARRIER
摘要
申请公布号
JPH02121343(A)
申请公布日期
1990.05.09
申请号
JP19880274141
申请日期
1988.10.28
申请人
IBIDEN CO LTD
发明人
NISHIWAKI TOSHIO;FURUKAWA KAZUHIRO;KOMURA TOSHITAMI;MIZUI TAKASHI
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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