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发明名称
SOURCE BOAT FOR VAPOR GROWTH
摘要
申请公布号
JPH02121326(A)
申请公布日期
1990.05.09
申请号
JP19880274760
申请日期
1988.10.31
申请人
NEC CORP
发明人
ARAI KENICHI
分类号
H01L21/205;H01L21/203
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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