| 摘要 |
An accelerometer 49 consists of a plate 37 of piezoelectric material mechanically supported 45 at one end and bearing a pair of spaced electrodes 51, 53 on one of its two principal plane faces. The piezoelectric material is poled such that the polar axis 43 lies orthogonal to the plane of the plate 37. The arrangement of the electrodes 51, 53 and the polar axis 43 is such that this accelerometer 49 is relatively insensitive to the accuracy with which the polar axis 43 is aligned and is relatively insensitive to the generation of any pyroelectric charge resulting from a change in temperature. Sensitivity may be enhanced by increasing inertial mass load - for example, by attaching a loading mass (55, Fig 7) at or near to the free end. In a preferred arrangement, loading plates (59, 61, Fig 8) are mounted, one on each principal plane face. Those latter increase inertial mass loading and reinforce the plate structure to resist bending. The plate may be supported at both ends, to facilitate the wire bonding of electrodes. <IMAGE> |
