ION BEAM RADIATING DEVICE,申请号JP19880275345-传众专利搜索

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发明名称	ION BEAM RADIATING DEVICE
摘要
申请公布号	JPH02121253(A)	申请公布日期	1990.05.09
申请号	JP19880275345	申请日期	1988.10.31
申请人	FUJITSU LTD	发明人	IGARASHI TAKASHI;MORI HARUHISA;KATO MASATAKA;YAMAGUCHI SEIICHIRO
分类号	H01J37/317;H01L21/265	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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