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发明名称
DIFFUSION OF PHOSPHORUS INTO POLYCRYSTALLINE SILICON FILM
摘要
申请公布号
JPH02121327(A)
申请公布日期
1990.05.09
申请号
JP19880275064
申请日期
1988.10.31
申请人
KAWASAKI STEEL CORP
发明人
HAIDA OSAMU
分类号
H01L23/52;H01L21/28;H01L21/3205;H01L29/78
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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