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发明名称
FILM FORMING METHOD
摘要
申请公布号
JPH02122076(A)
申请公布日期
1990.05.09
申请号
JP19880272456
申请日期
1988.10.28
申请人
TERU KYUSHU KK
发明人
MATSUMURA KIMIHARU;KAMIKAWA YUJI;NOMURA MASAFUMI
分类号
C23C16/50;C23C16/42;C23C16/44;C23C16/455;H01L21/31
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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