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发明名称
FORMATION OF MULTILAYER INTERCONNECTION
摘要
申请公布号
JPH02121350(A)
申请公布日期
1990.05.09
申请号
JP19880273288
申请日期
1988.10.31
申请人
OKI ELECTRIC IND CO LTD
发明人
OGURA KEN
分类号
H01L21/302;H01L21/3065;H01L21/768;H01L23/522
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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