PLASMA PROCESSING AND DEVICE THEREFOR,申请号JP19880272980-传众专利搜索

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发明名称	PLASMA PROCESSING AND DEVICE THEREFOR
摘要
申请公布号	JPH02121330(A)	申请公布日期	1990.05.09
申请号	JP19880272980	申请日期	1988.10.31
申请人	HITACHI LTD;HITACHI TECHNO ENG CO LTD	发明人	HAMAZAKI RYOJI;KIKKAI MOTOHIKO;TAKADA KAZUO
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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