| 摘要 |
PURPOSE:To enhance analytical accuracy by removing the effect of a background by alternately detecting the peak center value of an energy spectrum and the energy value of a background region and operation measured values. CONSTITUTION:The sample S on a sample stage A is moved to be irradiated with X-rays and discharged photoelectrons are allowed to be incident to an energy analyzer 2 to converge only photoelectrons of predetermined energy to a slit S2 and the converged photoelectrons are detected by an electron detector 3 and the number of photoelectrons are calculated by a counter 4. Herein, a CPU 5 performs control so that the peak center value E1 of an element to be measured and the energy value E2 of a background region are alternately detected at every one pixel on the basis of the signal from a synchronous signal oscillator 6. Then, the CPU 5 performs the subtraction of the count values E1, E2 by the counter 4 to store the obtained value as a measured value and this value is displated on a display device in relation to position data. |
