| 摘要 |
PURPOSE:To easily discharge bubbles from a supply pipeline for a liq. resist, a liq. rinse, a liq. developer, etc., by opening and closing a valve mechanism provided to a defoaming pipeline by the operation of a switch. CONSTITUTION:A specified liq. is supplied to a substrate 24 to treat the substrate. In this case, the defoaming pipelines 12-14 are branched from the pipeline 5 for supplying the liq. at the specified positions. The valve mechanisms 18-20 which are opened and closed by the operation of the switches 18a-20a are provided to the defoaming pipelines 12-14. Bubbles are discharged from the pipeline 5 by the operation of the switches 18a-20a. As a result, the bubbles in the pipeline for supplying a liq. resist, a liq. rinse, a liq. developer, etc., can be easily removed, and the operability can be improved as compared with the conventional process. |
