| 摘要 |
PURPOSE:To obtain a highly permeable and also a less expensive device by taking out a light beam which is generated at a high vacuum region and progresses in a beam line, to an irradiation treatment device which is placed in an atmospheric pressure region or in a low vacuum region of which degree of vacuum is close to that of an atmospheric pressure, from an end part of the beam line. CONSTITUTION:At a radiation device, a light beam 2 emitted from a certain light source 1 placed in a high vacuum region passes through an inside of a beam line 3, is emitted in a form of the light beam 2 into a chamber placed in an atmospheric pressure region or in a low vacuum region as low as the atmospheric pressure, permeating through a membrane 16 made of an organic material, which runs keeping contact with a taking-out outlet part of around 20X20mm in its size, and finally gives an exposure of a required pattern to a surface of a specimen 8 arranged at a predetermined location. In this case, alight source 1 part can be easily depressurized to a required degree of vacuum such as 1X10<-9> to 1X10<-10> Torr, for instance, by several differentially operated exhauster systems 9. |
