| 摘要 |
PURPOSE:To facilitate desired pattern marking without replacing a reticle by providing a liquid crystal display board being a reticle, and a system controller for sending a display signal to this display board. CONSTITUTION:A work 25 is placed on a table 3 which can move in the X-Y directions, a table controller 23 is driven by a command of a system controller 22, and the work 25 is moved to a prescribed position. Simultaneously, by driving a liquid crystal driving circuit 21, a pattern to be brought to marking is formed on a liquid crystal display board 20, and in accordance with this pattern, transmission of a light beam from a lamp 13 is controlled. Simultaneously, the developing the aligned work 25, marking is executed. When the work 25 is a printed board, etc., the marking pattern is aligned before or after an aligning process for forming a circuit pattern, and as soon as the circuit pattern is formed, marking is executed. |
