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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02119121(A)
申请公布日期
1990.05.07
申请号
JP19880272571
申请日期
1988.10.27
申请人
FUJITSU LTD
发明人
SUDO SATOSHI
分类号
H01L21/302;H01L21/027;H01L21/30;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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