发明名称 FORMATION OF PROTECTIVE FILM FOR SEMICONDUCTOR LASER END FACE
摘要 PURPOSE:To prevent creeping of a protective film to a mount surface without a rectangular jig to be inserted between semiconductor laser bars by closely arranging a plurality of semiconductor bars with the light emitting end face tilted and up on a flat supporting base and by depositing an insulating film. CONSTITUTION:Fixing jigs 3a, 3b are provided with an inclination of about 12 deg., and a plurality of semiconductor laser bars 1 are inserted therebetween in lamination with an electrode 6a at a side of a light emitting region 5 on the left side and fixed to a flat supporting base 4. A protective film is formed to an upper end side 7a on the semiconductor laser bar from an upper part through sputtering, etc. Then, a protective film is formed with a lower end side 7b up. According to this constitution, a protective film of a uniform film thickness can be formed all over the end side, thereby preventing creeping of the protective film on a mount surface.
申请公布号 JPH02119284(A) 申请公布日期 1990.05.07
申请号 JP19880273633 申请日期 1988.10.28
申请人 NEC CORP 发明人 ITO KIYOSHI
分类号 H01S5/00;H01S5/028;H01S5/042 主分类号 H01S5/00
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