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发明名称
PLASMA APPARATUS
摘要
申请公布号
JPH02119100(A)
申请公布日期
1990.05.07
申请号
JP19880273408
申请日期
1988.10.28
申请人
SUMITOMO METAL IND LTD
发明人
KOMACHI KYOICHI;MIYAHARA SHUNJI
分类号
H05H1/46;H01J27/08;H01J37/08
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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