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发明名称
VACUUM DEPOSITION DEVICE
摘要
申请公布号
JPH02118072(A)
申请公布日期
1990.05.02
申请号
JP19880270942
申请日期
1988.10.28
申请人
MITSUBISHI HEAVY IND LTD
发明人
TAGUCHI TOSHIO;HOSHI YOUNOSUKE;KOBAYASHI TOSHIRO;OKITA HAJIME;KAMIKAWA SUSUMU
分类号
C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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