CONVEYING METHOD OF VARIOUS KIND OF WORKPIECES AND DEVICE THEREFOR

摘要

PURPOSE:To improve the control of the flow of various kind workpieces in the title device in a semiconductor manufacturing system by conveying workpieces of various kinds by means of a carriage between each of processing devices and allowing a delivering unit to recognize desired workpieces and to deliver them to the carriage. CONSTITUTION:A track-like conveyance rail 1 is arranged to a central ceiling for allowing a carriage 2 to run between process means 60. A wafer delivering unit 20 with cleaning device is arranged in front of each processing device 60 to perform delivering work of wafers between the processing device and the carriage 2. A basic unit equipment module 90 is composed of this processing device 60 and wafer delivering unit 20. In this constitution, the carriage 2 conveys wafers between a loading and unloading device 80 and each delivering unit 20, which recognizes desired wafers and perform delivering. This constitution improves the controlability of wafers of various kinds.