| 摘要 |
PURPOSE:To improve permeability of light by taking out a light beam while high speed inactive gas is allowed to flow from the specified direction in a slit hole for penetrating at the specified angle to the vertical face of the center axis of a beam line. CONSTITUTION:In the part of a partition wall of a beam line 15 the partition wall is taken in as it is while a chamber 17 filled with a gas is provided with a gas pressure controller 18 for controlling injection gas, a compressor 19 and a gas separator 20. In this case, after the gas in the chamber 17 is compressed by the compressor 19, only a high purity gas is injected by the gas separator 20 in the partition wall of the beam line. After light beam 2 emitted from a light source 1 passes through the inside of the beam line 15 and reaches a light pass hole 15, the partition wall composed of inactive gas layer moving at high speed is permeated as it is, and taken out from an end face 15a to become a light beam 2, next patterning is performed by a mask 8 and the surface of a specimen 9 is light-exposed. |
