PRODUCTION OF DISPLAY ELECTRODE SUBSTRATE

摘要

PURPOSE:To electrically disconnect a picture element electrode and a thin-film transistor which is shorted to this electrode and to automatically correct a defective point without making defect inspection by forming an insulating film on both the surfaces of source electrodes and drain electrodes by an electrochemical treatment. CONSTITUTION:A glass substrate 11 formed with TFT 18 is immersed into an aq. ammonium borate soln. 31 filled in a container 30 and is subjected to an anodic oxidation treatment. A Ta2O5 film is formed not only on the source electrode 15a but on the drain electrode 16 as well if the source electrode 15a and drain electrode 16 of the TFT 18 is shorted. Finally, an ITO film having the area corresponding to one picture element is patterned and formed by using a sputtering method so as to be superposed on the drain electrode 16 and is used as the picture element electrode 17. The picture element 17 is electrically disconnected from the TFT 18 in this way and the defect by shorting is automatically corrected without making separate inspection of shorting.