| 摘要 |
PURPOSE:To obtain a highly accurate table movement by fixing the screw shaft of a feeding driving system and driving a table by rotating a ball nut, in the XY table working the body to be worked from the front and back both faces of the table. CONSTITUTION:The screw shaft 31 of a ball screw 3 performs fore and after movement in Y direction to drive two-dimensional moving means 5, 6, 7 in Y direction. On the other hand, the ball nut of a ball screw 4 is moved in X direction along the screw shaft 41 fixed to the two-dimensional moving means 6 to drive a moving table 2 in X direction. As a result, the moving table 2 becomes capable of plane movement in the both XY directions, but in the above mentioned structure, the screw shafts 31, 41 of the feeding driving system are arranged by fixing to the outside of the two-dimensional moving means 5, 6, the moving table 2 is moved by acting the pressing force or tensile force in the axial direction on the screw shaft 31, 41 and so, the space of the moving table lower face side is released. Also no large moment load is acted on the feeding driving system. |
