发明名称 |
OPTICAL WAVEGUIDE UTILIZING A LAYERED STRUCTURE |
摘要 |
<p>OPTICAL WAVEGUIDE UTILIZING A LAYERED STRUCTURE A planar silicon dioxide waveguide with low loss for the TE mode has been built on a silicon wafer by separating the waveguide from the substrate with a relatively thin layer of polycrystalline silicon and a layer of silicon dioxide having a combined thickness less than that of the waveguide. The separating layers provide a high antiresonant reflectivity which is operative over a broad range of wavelengths.</p> |
申请公布号 |
CA1268363(A) |
申请公布日期 |
1990.05.01 |
申请号 |
CA19870526668 |
申请日期 |
1987.01.05 |
申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY |
发明人 |
DUGUAY, MICHEL A.;KOCH, THOMAS L.;KOKUBUN, YASUO;PFEIFFER, LOREN N. |
分类号 |
H01L27/15;G02B6/122;H01S5/00;(IPC1-7):G02B6/10 |
主分类号 |
H01L27/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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