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发明名称
METHOD FOR FORMING ELECTRODE
摘要
申请公布号
JPH02117173(A)
申请公布日期
1990.05.01
申请号
JP19880271357
申请日期
1988.10.27
申请人
FUJITSU LTD
发明人
KATO ICHIRO
分类号
H01L29/78;H01L21/28
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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