| 摘要 |
<p>PURPOSE:To stabilize the temperature of a sample by a method wherein, when the sample is inserted into and taken out of a vacuum chamber, series of chambers composed of preliminary vacuum chambers, preliminary exhaust chambers and cassette chambers which are linked in series and correspond to the taking-in and taking-out of the sample are alternately attached to a sluice valve provided on the side wall of the vacuum chamber. CONSTITUTION:A sluice value 12a is provided on the lower part of one of the side walls of a vacuum chamber 11. A series of structure composed of a preliminary vacuum chamber 13, a preliminary exhaust chamber 14 for taking a sample into the vacuum chamber 11 and a cassette 16 for inserting the sample into the vacuum chamber 11 and used in the outside atmosphere provided in this order from the side of the sluice valve 12a is attached to the sluice valve 12a. Further, a series of structure composed of a preliminary vacuum chamber 13, a preliminary exhaust chamber 15 for taking the sample out of the vacuum chamber 11 and a cassette 17 for taking the sample out of the vacuum chamber 11 and used in the outside atmosphere is provided in parallel with the former structure. The two structures are linked with each other by a sliding table 18 and the slide table 18 is slid to attach the two preliminary chambers 13 to the sluice valve 12a alternately and the sample is inserted into or out of the vacuum chamber 11 by opening and closing the sluice valve 12a. Moreover, sluice valves 12b, 12c, 12d and 12e are provided in the structures.</p> |
