| 摘要 |
PURPOSE:To reduce the difference in quantity of background light between picture elements by arranging division zones, which divide picture elements, on a light incidence rear face, providing a certain optical aperture for each picture element and allowing it to function as an individual cold aperture. CONSTITUTION:A photodetector consists of picture elements 1 made of HgCdTe layers having pn junction, metallic electrodes 4 connected to a CCD array, a transparent substrate 5 made of CdTe, an antireflection film 6, and an insulating film 7. A division zone 31 functioning as the individual cold aperture is constituted by extending a picture element separating zone 30 up to the substrate 5. An SiO2 film or an Si3N4 film is buried to constitute the division zone 31, and a height H of the division zone 31 is determined by the F value of an aperture adapted to the temperature range to be measured. Thus, the quantity of background light of each picture element 1 is uniformized, and only a peripheral part is affected by the cold shield and a slight difference is generated there, and the difference in quantity of background light between picture elements is reduced. |
