| 摘要 |
PURPOSE:To restrain a yield from being lowered by a method wherein a foreign- body detection function on the surface of a workpiece is added to a workpiece processing and working apparatus, it is detected and judged whether a foreign body exists or not just prior to a working operation such as a pattern drawing operation or the like and the working operation is stopped if it is influenced. CONSTITUTION:A spare room 1 is provided with a foreign-body detection means composed of a light source 3, an oscillating mirror 4, a scanning lens 5 and a photodetecting sensor 7. While the surface of a workpiece 6 is scanned by a laser beam from the light source 3 through the oscillating mirror 4 and the scanning lens 5, a holder jig 9 is shifted; the whole surface of the workpiece 6 is scanned by a laser spot; scattered light generated by a foreign body is detected by using the photodetecting sensor 7. A signal of the detected scattered light is transferred to a signal processing means constituted of a computer and the like; it is analyzed and processed; it is controlled whether a sequence is continued or not. |
