| 摘要 |
PURPOSE:To enable detection of a defect in inspection accurately even when an inspecting surface is curved or rugged by comparing an intensity distritution of reflected light measured for the inspecting surface to an intensity distribution of that for a reference surface. CONSTITUTION:An object 1 to be inspected is placed on a measuring base and light from a light source 3 is made to irradiate a surface 2 to be inspected to measure an intensity of reflected light from the surface 2 to be inspected with a measuring device 4. The measurement is performed over all parts of the surface 2 to be inspected on which the existence of defects is not desired, which enables measurement of an intensity of the reflected light from a measuring part 5 simultaneously. Moreover, the measuring device should be set at a position as far as possible from the surface 2 to be inspected to minimize a blurring. Furthermore, reflected light from a measuring base is down to zero in substance. This allows accurate determination of a position of an end rim of the object 2 to be inspected thereby removing errors based on a positional deviation along an X axis or Y axis of the object 2 to be inspected. |
