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发明名称
VERFAHREN UND ANORDNUNG ZUM BEARBEITEN EINES WERKSTUECKS MITTELS EINES FOKUSSIERTEN ELEKTRONENSTRAHLS.
摘要
申请公布号
DE3381350(D1)
申请公布日期
1990.04.26
申请号
DE19833381350
申请日期
1983.10.08
申请人
INSTITUT FUER KERNTECHNIK UND ENERGIEWANDLUNG E.V., 7000 STUTTGART, DE
发明人
KOCH, DR.-ING., DIETER, D-7000 STUTTGART 31, DE
分类号
B23K15/00;(IPC1-7):B23K15/00;G05B19/415
主分类号
B23K15/00
代理机构
代理人
主权项
地址
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