| 摘要 |
<p>PURPOSE: To replace a damaged element with a simple operation by collecting the element easy to damage and a gas storing vessel into the same part of a tube which is separable from the other part by an airtight connecting system in order to perform a replacement necessary for regeneration. CONSTITUTION: A part 1 to be stored of a tube has an accelerating electrode 4 integrated with an ion source 3 and a wall 2, and the part 1' to be replaced has (a target 6 and titanium storing vessels 7, 8), (a suppressing electrode 5 and a gauge 9), and (a pump tube 10 and a device 11 for gradually exposing the tube to the atmospheric pressure) for regeneration of the tube. A connecting system for ensuring the airtightness between the two parts 1, 1' of the tube is formed of circular rings 12 and 12' integrated with the walls 2, 2' of the tube, respectively, and an intermediate flange 14, and a metal joint 15 is fastened with the middle flange 14 in between by a fixing screw 13. Thus, the operation for assembling and removable is facilitated.</p> |
