| 摘要 |
A method is provided herein for purifying a nitrogen trifluoride gas. The method includes the steps of thermally treating a natural zeolite, e.g., analcime, clipnoptilolite, mordenite, ferrierit, phillipsite, chabazite, erionite and laumontite, at a temperature of 250.degree. to 700.degree.C. A packed bed is then formed of such treated zeolite. The nitrogen trifluoride gas containing N2F2 in the amount of 0.2 to 0.6% as gaseous impurities is then passed through the packed bed at a temperature of -125.degree. to 50.degree.C. .
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