发明名称 REMOUNTING EQUIPMENT FOR MULTIPLE-ARRANGED BODIES
摘要 <p>PURPOSE:To improve processing speed, and exclude the mechanism wherein dust and the like are apt to generate by enabling the collective remounting by accurately changing the pitches of many bodies to be arranged. CONSTITUTION:The pitch of a multiple pantograph structure 18, 35 is set so as to be matched with a first pitch interval, and a plurality of bodies 11 being arranged are held en bloc by a pair of holding mechanism 15. By changing the pitch of the multiple pantograph structure 18, 35 in the wrapping mechanism 15, an interval of the holding part 17 of the holding mechanism 15 is changed into a second pitch interval, and the bodies 11 to be arranged are arranged at the second pitch intervals, thereby mounting the bodies at remounting positions. In this manner, a specified amount of bodies 11 of one-batchewise to be arranged are remounted by one process, and bodies 11 to be arranged are remounted by several times necessary remounting processes. Since the holding mechanism 15 is the multiple pantograph structure 18, 35 formed in a unified body, the remounting process is surely and quickly executed, and dust or the like does not generate, so that very clean operation can be realized.</p>
申请公布号 JPH02113546(A) 申请公布日期 1990.04.25
申请号 JP19880266068 申请日期 1988.10.24
申请人 TOKYO ELECTRON LTD 发明人 OSAWA SATORU
分类号 B65G49/07;B65G47/90;H01L21/677;H01L21/68 主分类号 B65G49/07
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