发明名称 Preparation method of amorphous superlattice alloys.
摘要 <p>Preparation method of amorphous superlattice alloys consisting of lamellae based on periodic change in the composition by continuous conventional sputtering during periodic change in the positions of substrates relative to a target or targets.</p>
申请公布号 EP0364902(A1) 申请公布日期 1990.04.25
申请号 EP19890119081 申请日期 1989.10.13
申请人 YOSHIDA KOGYO K.K.;HASHIMOTO, KOJI 发明人 HASHIMOTO, KOJI;YOSHIOKA, HIDEAKI;ASAMI, KATSUHIKO;KAWASHIMA, ASAHI
分类号 C23C14/14;C23C14/34;C23C14/50 主分类号 C23C14/14
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