发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To diminish the pn junction capacity between a source region, a drain region and a substrate for accelerating the data reading-out rate (access time) by a method wherein the memory cells storing different data are composed of different depression type threshold value voltages. CONSTITUTION:In a vertical mask ROM, a memory cell NDD storing '0' data is composed of a depression type threshold value voltage while another memory cell MD storing '1' data is composed of another different depression type threshold value voltage from that of the memory cell MDD. Consequently, the memory M especially the memory cell MD storing the '1' data diminishes the led-in amount of p type impurity 15P for writing-in data further to diminish the pn junction capacity between the source region, drain region of a MOSFET and a p<->type well region (substrate)3. Through these procedures, the data reading-out rate (access time) can be accelerated.
申请公布号 JPH02113575(A) 申请公布日期 1990.04.25
申请号 JP19880266905 申请日期 1988.10.21
申请人 HITACHI LTD 发明人 SHIBATA TAKASHI
分类号 H01L21/8246;H01L27/112 主分类号 H01L21/8246
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